Our range of dry exhaust gas cleaners provides a reliable solution for the safe and efficient treatment of industrial exhaust gases. Based on chemical adsorption and chemisorption at room temperature, the systems remove pollutants from CVD systems, ion implanters and plasma etchers without additional energy input. An integrated bypass cartridge ensures immediate emergency treatment, while temperature and pressure monitoring control reaction heat and provide early indication of possible blockages. Operation is handled comfortably via a modern touch-screen TFT monitor that clearly displays all relevant information. Optional gas and leak detection systems, interfaces to process equipment and centralized visualization of multiple cleaners are available, allowing flexible integration into existing production environments. The exhaust gas cleaners thus combine maximum safety, ease of use and sustainable efficiency for demanding high-tech processes.
SSD-50
The SSD‑50 is the smallest available version of our dry gas cleaners. With its compact 50‑liter canister it is particularly suited for use in research and development, where flexibility and space-saving solutions are required.
| Technical Features | Product Data |
|---|---|
| Canister volume | 50 liters |
| Gas inlet | NW 40 flange, 1 port |
| Gas outlet | NW 40 flange, 1 port / -25 to -75 mmHâ‚‚O |
| Bypass line | 1/2" piping |
| Enclosure exhaust | Ø 100 mm flange |
| Electrical power consumption | Max. 220 W |
| Voltage / Phase | 208 V / 1 phase, 50/60 Hz, 1 A |
| N₂ (Nitrogen) | Max. 5 SLM; 4–6 Kgf/cm²; 1/4" Lok fitting |
| Dimensions | 600 (W) × 500 (D) × 1500 (H) mm |
| Weight | 180 kg |
| Certification | CE |
SSD-100
The SSD‑100 expands this series with a more powerful variant featuring a 100‑liter canister. It is ideal for pilot plants and smaller production environments where a larger exhaust volume must be treated safely and efficiently without sacrificing proven technology and user-friendliness.
| Technical Features | Product Data |
|---|---|
| Canister volume | 100 liters |
| Bypass canister volume (optional) | 1.5 liters (optional) |
| Electrical power | 1 phase, 208 V, 3 A, 50/60 Hz |
| Nitrogen (N₂) | 4.5–7 Kgf/cm², 10 SLM, 1/4" Lok fitting |
| Gas inlet | 1 port, NW 40 flange |
| Gas outlet | 1 port, NW 40 flange |
| Enclosure exhaust | Ø 100 mm flange |
| Sample outlet | 1/4" Lok fitting |
| Dimensions | 650 (W) × 650 (D) × 1700 (H) mm |
| Weight | 240 kg |
| Certification | CE |
More capacity for your processes
For higher capacity requirements, we offer dry gas cleaners with larger canisters on request.
SBD-200
The SBD200 scrubber model was specifically developed for demanding specialized applications. It combines the benefits of a catalytic scrubber with a powerful burner to deliver particularly efficient dry gas cleaning at flow rates up to 200 slm. By combining combustion and adsorption, pollutants are reliably removed while stable operating conditions are maintained. The SBD200 model therefore offers a flexible solution for processes that require the highest standards of purity, safety and cost-effectiveness.
| Technical Features | Product Data |
|---|---|
| Gas inlet | NW40 flange, 1–3 connections |
| Gas outlet | NW63 flange, 1 connection / -25 to -75 mmH2O |
| Enclosure exhaust | Diameter 150 mm flange |
| Electrical power consumption | Max. 7.5 kW |
| Voltage / Phase | 208–220 V / 3-phase, 60 Hz, 30 A |
| CDA (compressed dry air) | Max. 200 SLM; 2–3 kgf/cm²; 3/8" Lok fitting |
| Water consumption | Max. 6–8 SLM; 2–3 kgf/cm²; 3/8" Lok fitting |
| PCW inlet/outlet | Max. 12–16 SLM; 2–3 kgf/cm²; 1/2" Lok fitting |
| N2 (Nitrogen) | Max. 60 SLM; 4–6 kgf/cm²; 1/4" Lok fitting |
| Dimensions | 1800 (W) × 900 (D) × 1800 (H) mm |
| Certification | CE |
| Weight | 560 kg |
MIDAS-II
The MIDAS‑II scrubber model offers, unlike catalytic systems, a powerful combination of a burner and cooling. This technology enables particularly efficient dry gas cleaning at flow rates up to 200 slm. Pollutants are reliably removed by controlled combustion, while the integrated cooling ensures stable operating conditions. MIDAS‑II thus combines high cleaning performance with safe and economical operation – ideal for demanding applications in industrial exhaust gas treatment.
| Technical Features | Product Data |
|---|---|
| Specification | Total gas treatment volume 200 SLM |
| Gas inlet | NW40, 1–2 connections |
| Gas outlet | NW63, 1 connection / -25 – -75 mmH₂O |
| Enclosure exhaust | Diameter 150 mm flange / -50 – -125 mmH₂O |
| Electrical power consumption | 10.5 kW |
| Heater power consumption | 9.9 kW |
| Voltage / Phase | 208 V / 3‑50/60 Hz, 40 A |
| CDA (Compressed Dry Air) | Max. 200 SLM; 2–3 Kgf/cm² (2–3 bar); 3/8" Lok fitting |
| Cooling water inlet/outlet | Max. 12–18 SLM; 2–3 Kgf/cm² (2–3 bar); 3/8" Lok fitting |
| N₂ (Nitrogen) | Max. 30 SLM; 4–6 Kgf/cm² (4–6 bar); 1/4" Lok fitting |
| Dimensions | 800 (W) × 700 (D) × 1670 (H) mm |
| Weight | 350 kg |
| Certification | CE |
| Application | MOCVD |
