"Catalytic" Exhaust Cleaner

Dry exhaust cleaners or dry scrubbers use chemisorption and adsorption to remove pollutants from exhaust streams. Special chemicals with a large surface area are employed to adsorb toxic substances onto their surfaces. The adsorbent is contained within a special cartridge. The required contact time is very short and does not depend on the inlet concentration. When the material is fully consumed, it must be replaced. This gas detoxification method can be applied to virtually all exhausts encountered in semiconductor manufacturing processes. It requires neither electricity nor gases nor water for the purification step. What is required, however, is maintenance. The adsorbent or catalyst must be regularly changed and the spent chemicals must be disposed of. Adsorber material colored with an indicator shows in a window when about 90% of the cartridge fill is used up and the material must be replaced. By using a color sensor it is possible to trigger an automatic alarm upon color change.

Dry exhaust cleaner by chemisorption / adsorption

Dry gas purification is particularly suitable for low pollutant concentrations, since in that case the service life of a cartridge fill is long. It is also recommended for emergency purification systems where typically no pollutants are present in the exhaust, but in the event of an accident high pollutant levels may occur and should be captured by the dry scrubber. In such cases the cleaner is used intermittently and wet scrubbers or burner-and-scrubber combination systems are usually less suitable due to their continuous operating costs.
SemiAn offers catalytic exhaust cleaners developed for treating process exhausts commonly found in semiconductor manufacturing and in the production of liquid crystal displays. Our exhaust cleaners are designed for gas flows of approximately 100 - 1,200 slm (6 - 72 m3/h). We are also pleased to supply scrubbers of this size class for other applications, reliably and cost-effectively.

Overview of Dry Gas Scrubber Types

Our range of dry exhaust gas cleaners provides a reliable solution for the safe and efficient treatment of industrial exhaust gases. Based on chemical adsorption and chemisorption at room temperature, the systems remove pollutants from CVD systems, ion implanters and plasma etchers without additional energy input. An integrated bypass cartridge ensures immediate emergency treatment, while temperature and pressure monitoring control reaction heat and provide early indication of possible blockages. Operation is handled comfortably via a modern touch-screen TFT monitor that clearly displays all relevant information. Optional gas and leak detection systems, interfaces to process equipment and centralized visualization of multiple cleaners are available, allowing flexible integration into existing production environments. The exhaust gas cleaners thus combine maximum safety, ease of use and sustainable efficiency for demanding high-tech processes.

SSD-50

The SSD‑50 is the smallest available version of our dry gas cleaners. With its compact 50‑liter canister it is particularly suited for use in research and development, where flexibility and space-saving solutions are required.

Specification
Technical Features Product Data
Canister volume 50 liters
Gas inlet NW 40 flange, 1 port
Gas outlet NW 40 flange, 1 port / -25 to -75 mmHâ‚‚O
Bypass line 1/2" piping
Enclosure exhaust Ø 100 mm flange
Electrical power consumption Max. 220 W
Voltage / Phase 208 V / 1 phase, 50/60 Hz, 1 A
N₂ (Nitrogen) Max. 5 SLM; 4–6 Kgf/cm²; 1/4" Lok fitting
Dimensions 600 (W) × 500 (D) × 1500 (H) mm
Weight 180 kg
Certification CE
Scrubber SSD-50

SSD-100

The SSD‑100 expands this series with a more powerful variant featuring a 100‑liter canister. It is ideal for pilot plants and smaller production environments where a larger exhaust volume must be treated safely and efficiently without sacrificing proven technology and user-friendliness.

Specification
Technical Features Product Data
Canister volume 100 liters
Bypass canister volume (optional) 1.5 liters (optional)
Electrical power 1 phase, 208 V, 3 A, 50/60 Hz
Nitrogen (N₂) 4.5–7 Kgf/cm², 10 SLM, 1/4" Lok fitting
Gas inlet 1 port, NW 40 flange
Gas outlet 1 port, NW 40 flange
Enclosure exhaust Ø 100 mm flange
Sample outlet 1/4" Lok fitting
Dimensions 650 (W) × 650 (D) × 1700 (H) mm
Weight 240 kg
Certification CE
Scrubber SSD-100

More capacity for your processes

For higher capacity requirements, we offer dry gas cleaners with larger canisters on request.

SBD-200

The SBD200 scrubber model was specifically developed for demanding specialized applications. It combines the benefits of a catalytic scrubber with a powerful burner to deliver particularly efficient dry gas cleaning at flow rates up to 200 slm. By combining combustion and adsorption, pollutants are reliably removed while stable operating conditions are maintained. The SBD200 model therefore offers a flexible solution for processes that require the highest standards of purity, safety and cost-effectiveness.

Specification
Technical Features Product Data
Gas inlet NW40 flange, 1–3 connections
Gas outlet NW63 flange, 1 connection / -25 to -75 mmH2O
Enclosure exhaust Diameter 150 mm flange
Electrical power consumption Max. 7.5 kW
Voltage / Phase 208–220 V / 3-phase, 60 Hz, 30 A
CDA (compressed dry air) Max. 200 SLM; 2–3 kgf/cm²; 3/8" Lok fitting
Water consumption Max. 6–8 SLM; 2–3 kgf/cm²; 3/8" Lok fitting
PCW inlet/outlet Max. 12–16 SLM; 2–3 kgf/cm²; 1/2" Lok fitting
N2 (Nitrogen) Max. 60 SLM; 4–6 kgf/cm²; 1/4" Lok fitting
Dimensions 1800 (W) × 900 (D) × 1800 (H) mm
Certification CE
Weight 560 kg
Scrubber SBD-200

MIDAS-II

The MIDAS‑II scrubber model offers, unlike catalytic systems, a powerful combination of a burner and cooling. This technology enables particularly efficient dry gas cleaning at flow rates up to 200 slm. Pollutants are reliably removed by controlled combustion, while the integrated cooling ensures stable operating conditions. MIDAS‑II thus combines high cleaning performance with safe and economical operation – ideal for demanding applications in industrial exhaust gas treatment.

Specification
Technical Features Product Data
Specification Total gas treatment volume 200 SLM
Gas inlet NW40, 1–2 connections
Gas outlet NW63, 1 connection / -25 – -75 mmH₂O
Enclosure exhaust Diameter 150 mm flange / -50 – -125 mmH₂O
Electrical power consumption 10.5 kW
Heater power consumption 9.9 kW
Voltage / Phase 208 V / 3‑50/60 Hz, 40 A
CDA (Compressed Dry Air) Max. 200 SLM; 2–3 Kgf/cm² (2–3 bar); 3/8" Lok fitting
Cooling water inlet/outlet Max. 12–18 SLM; 2–3 Kgf/cm² (2–3 bar); 3/8" Lok fitting
N₂ (Nitrogen) Max. 30 SLM; 4–6 Kgf/cm² (4–6 bar); 1/4" Lok fitting
Dimensions 800 (W) × 700 (D) × 1670 (H) mm
Weight 350 kg
Certification CE
Application MOCVD
Scrubber MIDAS-II

Exhaust purification using six specialized adsorbents

With our innovative method even complex mixtures of pollutants can be reliably removed from exhaust streams. We use six specially developed adsorbents tailored to different pollutant groups. This efficiently cleans contaminated air and converts it into clean air. The result: maximum purity, environmental sustainability and economical operation. Thanks to the high performance of our adsorbents you benefit from a flexible solution that adapts to a wide range of industries and requirements. Our technology not only ensures compliance with legal limits but also creates tangible value for your business: lower operating costs, higher efficiency and a clear contribution to environmental protection.

Adsorbent Pollutant
Zebent 1 BCl3, Cl2, etc.
Zebent 2 BCl3, BF3, Cl2, HBr, HCl, HF, F2, WF6, etc.
Zebent 3 B2H6, SiH2Cl2, SiH4, Si2H6, TEOS, TMB, TMP, etc.
Zebent 4 BCl3, Cl2, NH3, SiH2Cl2, etc.
Zebent 5 AsH3, B2H6, H2S, H2Se, PH3, etc.
Zebent 6 BCl3, BF3, Cl2, GeF4, HBr, HCl, HF, F2, etc.

For additional chemicals or higher flow rates, further scrubber models are available. A complete overview of our product range can be found here.