JTEKT Thermo Systems produces several versions of vertical furnaces with fully automatic loading or manual handling for applications in semiconductor manufacturing. Small configurations for pilot lines and research institutes are available.
One specialty of JTEKT Thermo Systems is low-temperature applications such as polyimide curing, SOG or hydrogen annealing.
Products of JTEKT Thermo Systems (formerly Koyo Thermo Systems)
JTEKT Thermo Systems manufactures all types of horizontal and vertical furnaces, cluster systems, heating elements, RTP systems, LCD process equipment, conveyor furnaces and industrial furnaces.
JTEKT Thermo Systems (formerly Koyo Thermo Systems) manufactures a wide range of horizontal furnaces with and without automation, although their importance in modern semiconductor manufacturing is decreasing. Today, vertical furnaces are state of the art and even research labs increasingly use vertical furnaces. Horizontal furnaces are still common in the field of solar cell production. Small versions of vertical furnaces for laboratories are available.
A specialty of JTEKT Thermo Systems is low-temperature applications such as polyimide curing, SOG or hydrogen annealing.
JTEKT Thermo Systems RTP systems (RLA-xxxx) offer a unique lamp arrangement with crossed lamp arrays above and below the sample. Through the use of a temperature distribution aid and outstanding and unrivaled temperature uniformities, they achieve high process reproducibility and minimize the occurrence of slip lines.
JTEKT Thermo Systems manufactures conveyor furnaces for a wide range of applications and processes such as thick film tempering, burn-off of electrodes or thermal print heads. Other applications include thermal treatments of sealants, tempering and drying processes, soldering furnaces, furnaces for layer flow and resin curing furnaces.
JTEKT Thermo Systems produces a wide range of industrial furnaces for processes such as hardening and carburizing, carbonitriding, nitriding, tempering, quenching, sintering and brazing. Furnace loading can be automatic or manual from the side, front or bottom. Various process gases and vacuum are available.
JTEKT Thermo Systems produces several types of furnaces for applications in the ceramics industry such as drying, decarbonization, continuous firing and sintering. JTEKT Thermo Systems has extensive experience in this field and is a market leader in Japan for decarbonization and continuous firing. We can provide a long customer list upon request.
Patented LGO heating elements have a thermal mass that is <50% of equivalent industry heating elements. LGO heaters have superior temperature uniformity, offer much faster temperature ramping than standard industry heating elements and offer superior control at low temperatures. Durability and extended lifetime are key features.
JTEKT Thermo Systems produces different kinds of heating elements. The plain type is used in JTEKT Thermo Systems conveyor furnaces. It can also be used individually by customers for the construction of special furnaces, furnace chambers or heating zones. The half-cylinder type of the Moldatherm heating elements can be used by customers to design high-temperature heating mantles for tubes. These heating elements can be used for temperatures between 140°C and 1250°C.
JTEKT Thermo Systems and Crystec look forward to building a cost-effective system for you that meets your most demanding requirements.









