LGO heating elements for tube furnaces

JTEKT Thermo Systems (formerly Koyo Thermo Systems) manufactures Light Gauge Overbend (LGO) heating elements, but can also supply Heavy Gauge Coil (HGC) heaters.

Light Gauge Overbend (LGO) heating elements
LGO performance semiconductor heater
Heavy Gauge Coil (HGC) heating elements
HGC conventional semiconductor heater
Comparison of LGO and HGC heating elements

The table below provides an overview of the key technical parameters of the two heater types LGO and HGC for comparison.

Type Temperature
range
Heat
capacity
Weight Stability Heating wire
arrangement
Heating
rates
Cooling
rates
Temperature
accuracy
Overshoot
prevention
LGO 120°C-1150°C low low high Meander fast fast very high very good
HGC 400°C-1300°C high high good Coil normal normal high normal

Below, the two heater types are compared regarding their performance in various process applications.

Type Polyimide cure Hydrogen anneal SOG anneal Doping Oxidation High-temperature oxidation LP Oxide LP Nitride LP Polysilicon
LGO excellent excellent excellent good good - good good good
HGC good good good good good good good good good
Precise temperature control for low-temperature processes