Crystec Technology Trading GmbH

The automated version of the clean oven consists of cassette transfer stations, precision robots for transferring glass plates from the cassettes into the oven and a series of clean furnaces.

In the CBS version one to two ovens can be installed immediately behind the cassette transfer stations. In the CCBS version it is possible to install a larger number of clean ovens to increase throughput. The system layout is highly flexible with regard to configuration, substrate size and production capacity. The image on the left shows a CBS system with three cassette stations and two clean ovens.

Clean ovens can be used for laboratory experiments or in an automated version for non-continuous operation under inert gas. A detailed description of our box ovens can be found on our separate page.

Walking-beam continuous furnaces

The continuous furnace is based on a highly precise walking transport system with outstanding cleanliness, ensuring particle-minimized and secure transport inside the oven. The transport of the glass substrate stored in a heat-resistant cassette enables high production efficiency. Thanks to this batch transport technology, large substrate volumes are processed reliably, cleanly and with minimal handling effort.

The walking-beam furnace is available as both vertical and horizontal designs. Vertical walking-beam furnaces (types VX and VWB) move panels individually through two vertically stacked process towers and then to cooling. They can be operated inline or via cassette transfer. The VX type transports panels using a special corner-grip system and is suitable for large formats (up to 550 × 650 mm) but may show some bending at such sizes. The VWB type prevents this bending by using a fork transport system but requires more space.

The horizontal walking-beam oven uses IR heating and is mainly used for polyimide pre-bake and main-bake processes. Glass plates rest on quartz pins so that the polyimide is heated quickly while the glass itself is only moderately warmed. This enables very short soak times (approx. 12.6 min), high throughput and a homogeneous cure without surface overcure. The oven can be used up to 380 °C and offers temperature uniformity of ±5 °C.

With efficient conveying technology, high cleanliness inside the oven chamber and optimized process integration, both systems provide maximum cleanliness, high operational reliability and excellent throughput suitable for modern high-volume production lines.

Ceramic-chain continuous furnace

This furnace type processes glass plates cassette-wise. Cassettes are loaded by a robot, pass through the oven and are unloaded by another robot. Empty cassettes are returned along the outside of the oven. Both available furnace types are based on the same principle but differ in the transport mechanism: one version uses a lift-beam system, the other uses a ceramic chain for transport. This furnace offers great flexibility in terms of process time.

Roller-type continuous furnace

Specially developed ceramic transport rollers and the patented drive system enable an extremely clean, reliable and gentle transport of even large glass substrates, entirely without particle generation inside the oven. The integrated glass muff protects the process substrate from contamination and ensures the highest cleanliness throughout the process.

The innovative, highly insulating "Moldatherm" heater significantly reduces energy consumption while ensuring stable, efficient heat transfer. Gases released during the debinding process are fully cracked and removed by a catalytic system, enabling an especially environmentally friendly and low-emission production.

By stacking up to three heating sections vertically and integrating the cooling zone into the return transport, the oven length can be significantly reduced. This results in a much smaller footprint without compromising performance, cleanliness or process quality.

Vertical furnace VFS 4000 for large samples

This large-diameter vertical furnace employs strict temperature, atmosphere and particle control and leverages semiconductor manufacturing know-how for FPD processes. Quartz boats are used to create a particle-free, metal-free environment that enables vacuum thermal processing at O2 concentrations of 10 ppm or less. This furnace is suitable for tempering touch panels and other materials, post-bake and activation annealing. It is also suitable for various heat treatments of RDL (redistribution layer) on glass substrates, glass interposers, etc., for advanced semiconductor packaging such as chiplets and 2.xD/3D.