Equipment for the Semiconductor Industry
Equipment for the semiconductor industry — especially furnaces and RTP systems — remain our core business. Our most important partner in this field is JTEKT Thermo Systems, Japan. Today JTEKT mainly manufactures vertical furnaces for all common processes, but still also offers horizontal furnaces and cabinet furnaces of all kinds. Specialties include systems for low-temperature processes from 120°C, such as polyimide cure or copper tempering, as well as high-temperature systems up to 1800°C for processing SiC wafers. Versions for research and development that offer the same performance as production systems but are compact and flexible are also available.
We can offer process automation including loading robots (AGVs), OHT (overhead transportation) systems and cassette stockers via our partners Castec and Daesung.