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- Contact
- About us ▾
- Products ▾
- Semiconductor Manufacturing
- Manufacturing SiC electronic
-
Semiconductor Furnaces ▸
- Overview Furnaces
- Vertical furnaces
- • VF-1000/VF-3000 Small vertical furnaces
- • VF-5100/VF-5300 150mm and 200mm wafer
- • VF-5700/VF-5900 300mm wafer
- • University of Uppsala: Reference VF1000
- • Fraunhofer Institute IISB: Reference VF1000
- Horizontal furnaces
- • Comparison of vertical and horizontal furnaces
- Continous furnaces for phosphorous doping with POCl3
- RTP & RTA equipment
- Clean ovens. Equipment for pilot lines
- • Clean Oven CLH. Baking of Polyamid
- • Inert Gas Oven INH
- Conveyor furnaces
- LGO Heating elements
- Moldatherm® High temperature heating elements
- Solar cell-Manufacturing
- LCD-Manufacturing
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Machines for manufacturing LCD, OLED & DSSC ▸
- Overview
- Screen Printing- and flexo printing machines
- Rubbing machine: Orientation of polyimide layer
- Spacer Spray Equipment
- Vacuum assembly machine OLED, DSSC & e-paper
- ODF-Technology
- Autoclaves for removing gas bubbles
- LCD Assembly machine and hot press
- Micro LED
- FPD Furnaces
- UV cleaning technology
- Scribe and Break Machines
- Manufacturing of smart windows
- Fuel cell & battery-Manufacturing
- Machines for manufacturing fuel cells
- Machines for manufacturing batteries
- Industrial furnaces
- Gas technology
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Gas generators and gas treatment ▸
- Ammonia Cracker: Generation of hydrogen/forming gas
- PSA Purifier: Hydrogen purification
- Nitrogen Generator: Production of N2 from air
- Oxygen Generator: Production of O2 from air
- Methanol Reformer: Hydrogen Generation
- Electrolyser: Production of hydrogen
- Endo gas generator: Formation of endothermic gas
- Exo gas generator: Generation of exothermic gas
- Furnace accessories
- Heating elements
- Kiln furniture, special ceramic
- Applications ▾
- Semiconductor Manufacturing
-
Thermal Processes ▸
- Overview
- Diffusion of dopants
- Oxidation of silicon wafers
- H2-Anneal
- Polyimide cure
- Copper anneal
- Low-k cure for baking low-k materials
- LPCVD. Process overview
- poly-Silicon deposition in a CVD process
- Nitride deposition in a CVD process
- TEOS. CVD Silicondioxide deposition
- SOG Anneal (Spin on glas)
- SiC. High temperature furnaces for SiC circuits
- Solar cell-Manufacturing
- Silicon manufacturing and thermal processing
- LCD-Manufacturing
-
Manufacturing LCD, OLED & DSSC ▸
- Overview
- Screen Printing- and flexo printing machines
- Rubbing machine: Orientation of polyimide layer
- Spacer Spray Equipment
- Vacuum assembly machine OLED, DSSC & e-paper
- ODF-Technology
- Autoclaves for removing gas bubbles
- LCD Assembly machine and hot press
- Micro LED
- FPD Furnaces
- UV cleaning technology
- Scribe and Break Machines
- Manufacturing of smart windows
- Fuel Cell & Battery Manufacturing
- Manufacturing fuel cells
- Manufacturing batteries
- Industrial furnaces
- Gas technology
-
Gas generators and gas treatment ▸
- Ammonia Cracker: Generation of hydrogen/forming gas
- PSA Purifier: Hydrogen purification
- Nitrogen Generator: Production of N2 from air
- Oxygen Generator: Production of O2 from air
- Methanol Reformer: Hydrogen Generation
- Electrolyser: Production of hydrogen
- Endo gas generator: Formation of endothermic gas
- Exo gas generator: Generation of exothermic gas
- Furnace accessories
- Heating elements
- Kiln furniture, special ceramic
- Career
- Language ▾
